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Compact 4＂ RTP Tube Furnace System with Turbomolecular Vacuum Station _Complete Acessories(up to 1E-4torr _1100℃)OTF-1200X-RTP-HV-LD

產(chǎn)品型號：Compact 4＂ RTP Tube Furnace System with Turbomolecular Vacuum Station _Complete Acessories(up to 1E-4torr _1100℃)OTF-1200X-RTP-HV-LD

電爐類型：高溫電爐系列

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電爐系列：高溫馬弗爐

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產(chǎn)品簡介 / Introduction

Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station & Complete Acessories (up to 1E-4 torr & 1100℃ ) - OTF-1200X-RTP-HV-LD

Product Description

Compact 4“ RTP Tube Furnace with High Vacuum Station amp; Complete Accessories (up to 10^-5 torr amp; 1100℃) - EQ-OTF-1200X-4-RTP-HV

OTF-1200X-RTP-4-HV is aUL certifiablecompact rapid thermal processing tube (4" I.D.) furnace with High Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. Thefurnaceis heated by 8 units of 1KW halogen light around the processing tube with a max. heating rate of max. 50C/second. 30 segments precision temperature controller is built in with accuracy +/-1°C. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.

Furnace

structure

Compact 4“ RTP Tube Furnace（Double layer steel case mullite liner)

Heating element

8 pcs Halogen light tube (D=10 L=300 T =200, mm)

Working Temp.

1100℃max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting)

Max heating rate

50°C/sec

Max cooling rate

64°C/min (Under vacuum: 200 mtorr), 117°C/min (Under atmosphere pressure)

Heating zone

12" length with 4" constant temperature zone within +/-1℃uniformity

Program Temp. Controller

、PID automatic control via SCR (Silicon Controlled Rectifier)power control with phase angle fired, current limiting resistor. 、30 programmable segments for precise control of heating rate, cooling rate anddwell time. 、Please click here to learn why SCR is more accurate than SSC (Solid state relay). 、Built in PID Auto-Tune function with overheating amp; broken thermocouple brokenprotection. 、Over temperature protection and alarm allows for operation without attendant(s). 、+/- 1 oC temperature accuracy. 、RS485 Communications Port. 、PC Control: o A MTS-02control moduleis included for PC control on this furnace. o The new version of PC module is now compatible with Lab View 05/08/2014 o A laptop PC can be ordered for $900 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.

Quartz Tube amp; Sample Holder

、Quartz Tube Size: 4.33" O.Dx4.05" I.D x16.2" Length 、3" diameter Sample holder is inserted to sliding flange, which is made of quartz 、One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia. 、AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area 、The sample holder is removable from flange

Vacuum flange

KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.

Water Cooling Jacket

、Cooling water is required. 、Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. ＜ 25oC; pressure gt; 25 PSI. 、We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.

Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000oC ~ 1100oC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.

Flow meter

One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min

Power input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (gt; 60A breaker required)

HV StationHigh Vacuum Station

Structure

、Mobile cart size: 600 (L)x600 (W)x700(W), mm 、Max. Loading: 600 Lbs on top 、Molecular pump control Panel : LCD digital 、Diaphragm Pumpand Turbo Molecular Pumpare installed inside the steel case.

Vacuum Degree

6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)

Control panel

、One button operation- the diaphram pump and the turbo molecular pump will start after pressing "start" button. 、System controlled spining speed- the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber. 、Self protection- the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum. 、LCD screen- double lines parameters checking interfacemake the working easier to be handled.


Self testing	Spinning up

Start-up time

2 minutes

Backing Pump Volume Flow Rate at 10 mbar

3.8 L/min for 50Hz and 4.4 L/min for 60Hz

Power input

110V AC or 220V AC switchable, 50/60Hz

Power consumption

Duration/Max power: 100/110Watt

Shipping Info

Weight and Dimension

RTP furnace: 110 lbs, 760x330x530mm (30"x13"x21" inch) LxWxHHV station: 40 lbs, 600x600x700mm (24"x24"x28") LxWxH

Warranty

One year limited warranty with lifetime support(Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)

Laptop, software amp; WiFi Control (Optional)

、Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. 、 Temperature Control System (EQ-MTS01)enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces. 、A wireless remote control provides up to 300 meters operating range. 、Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
?Note: The software is only compatible with Yudian Temperature Controller

Compliance

、CE Certified 、The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information. 、Temperature controller is MET and CE Certified 、High Vacuum Station is TUV Certified

Application NotesClick here to learnthe installation of a gas regulator

、Tube furnaces with quartz tubes are designed for using under vacuum and low pressure ＜ 0.2 bar / 3 psi / 0.02 MPa 、Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000℃ 、Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator. 、The flow rate for gases should be limited to＜200 SCCM (or 200ml/min) for reducing thermal shocks to the tube

Operation Instructions

Standard package

Item No.	Name	Qty	Link
EQ-PV-HVS	Compact Turbo molecular Vacuum Pump Station	1
EQ-MTS02	Temperature PC control system (cable and software)	1
RTP-ACC-01	Sample Holder for RTP Furnace	1
AIN-Holder	Aluminum Nitride Substrate for PTP Furnace	1 pc
EQ-QZTube-RTP	Quartz Tube: 4.33" O.Dx4.05" I.D x16.2" Length for RTP Tube Furnace (installed)	1 pc
RTP-ACC-02	Quartz heat shield disk	4 pc
EQ-RTP-Halogen-light	Halogen light (heating elements)	8 pc
	High Temperature Silicone O-ring (?108)	6 pc
	High Temperature Silicone O-ring (?118)	3 pc
	20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI	1 pc
KF-Valve-D25	KF-25 Vacuum right angle valve	1 pc
EQ-KF-Clamp-D25	Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter	4 pc
EQ-KF-Clamp-D40	Quick Clamp with Rubber O-Ring for KF-D40 Vacuum adapter	3 pc
RU-KF40-25	KF40 to KF25 Reducer Union RU-KF40-25	1 pc
EQ-KF-Pipe-D25	KF-D25 Flexible Stainless Steel Vacuum Hose ( Bellows ) (1000mm +600mm)	2 pc
EQ-CVM-211	Compact Digital Vacuum Gauge	1 pc
RT36-00	63 A Fuse	2 pc
RT14-20	4 A fuse	2

Optional

You must implement cooling water during operation.Please make sure the flow rate of cooling watergt;= 3L/min, water temp. ＜ 20^oC pressure gt; 25 PSIWe suggest you use recirculating water chiller as cooling system (please order separately at the related product below) to save water.You can use flowing tap water as cooling source at flowing rate gt; 8 Liter/minute.Warning 1:With the normal tap water as cooling source, this RTP furnace's Max holding time shall be less than 600 seconds at 1000^oC ~ 1100^oC, otherwise O-ring may get melting.Warning 2:With the recommended recirculating water chiller as cooling system, this RTP furnace's Max holding time can last 1200 seconds at 1000^oC ~ 1100^oC, otherwise O-ring may get melting.Optional for upgrade: You may choose our gas mixer to replace mobile cart for better gas control- ( please order at the the related product below) Water cooling chiller Gas mix station

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產(chǎn)品·優(yōu)勢

PRODUCT ADVANTAGES

外形美觀

外殼由冷軋鋼板折,表面經(jīng)高速拋丸后靜電噴塑。
密封圈式電纜

可拆卸組合面有密封墊、環(huán)、圈、帽。
產(chǎn)品更耐用

推出新型設(shè)計方案，結(jié)構(gòu)合理、通用性強、使用壽命高。
按需定制

可按客戶要求定制。

生產(chǎn)基地production base

洛陽賽特瑞高溫實驗爐Sintering Furnace目前共有90余種實驗室設(shè)備產(chǎn)品：高溫馬弗爐、、高溫管式爐、氣氛爐、真空爐、熱震爐、結(jié)晶爐、火試金爐、箱式爐，常規(guī)品足量半成品儲備，快至3個工作日發(fā)貨，定制品承諾按期交貨；可根據(jù)客戶對產(chǎn)品環(huán)境測試的需求，為客戶量身定制性價比高的解決方案及非標(biāo)定制服務(wù)。